| 摘要 |
The present invention relates to an injection type plasma treatment apparatus. An object of the present invention is to provide an injection type plasma treatment apparatus capable of treating work pieces with a variety of areas, sizes and shapes without damages due to micro arc streamer by using a method of injecting plasma, which is generated through dielectric barrier discharge (DBD) under the normal pressure condition, toward the work pieces. To this end, the injection type plasma treatment apparatus of the present invention comprises a power electrode plate which is provided in the reaction chamber in a state where a dielectric is formed on the power electrode plate; a ground electrode plate which is formed with a plurality of holes, defines a part of a wall of the reaction chamber, and cooperates with the power electrode plate to generate plasma therebetween when alternating current power is applied to the power electrode plate; and a gas supply unit which introduces reaction gas into the reaction chamber and injects the plasma in the reaction chamber to the outside through the holes in the ground electrode plate.
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