| 摘要 |
A switching mode power source apparatus for semiconductor equipment is provided to apply a target voltage and dramatically reduce fault rate of semiconductor product by preventing malfunction. A switching mode power source apparatus which provides the power to a semiconductor equipment(200) comprises a A/C converter(110), voltage comparison unit(130), and voltage regulator(140). The A/C converter changes the alternating current to direct current and outputs. The voltage comparison unit compares a target voltage with feedback voltage from the semiconductor equipment and generates the voltage value.
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