| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of accurately and quickly machining a workpiece. <P>SOLUTION: The laser beam machining apparatus for performing burst shot machining by guiding a laser beam to an irradiation position on the workpiece with a galvano scanner and emitting a pulsed laser beam to the laser beam irradiation position serving as a machining hole, wherein a controller 11 for controlling irradiation timing of the laser beam by a laser oscillator 1 so that the pulsed laser beam is emitted in synchronization with the remaining oscillation frequency of galvano scanners 6A, 6B after the irradiation position of the laser beam reaches a target irradiation position is provided. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
