| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is provided with a ceramic dielectric capable of being easily fabricated by baking in the atmospheric environment and has high plasma resistance and uses Johnsen-Rahbeck force and has high adsorption force. SOLUTION: The electrostatic chuck is provided with the ceramic dielectric wherein a ceramic material which has an yttrium oxide as a main component and is obtained by baking contains a rare earth oxide different from the main component as an auxiliary component, and the volume resistivity of the ceramic dielectric is 1×10<SP>8</SP>to 1×10<SP>14</SP>Ωcm at a room temperature. COPYRIGHT: (C)2009,JPO&INPIT |
