| 摘要 |
A surface shape inspection device is provided to improve inspection performance for a field of view in a large scale by using an objective lens of a microscope by increasing visibility in the horizontal direction while keeping resolution in the vertical direction. A surface shape inspection device includes a lighting part(1), a beam splitter(2), a photodetector(5), and a control computer(6). The lighting part includes a microscope objective lens(12) for focusing light from a light source(11) into a spot light source shape, a slit(13) formed with a pinhole for passing the light which is projected in the spot light source shape from the objective lens, and a projection lens(14) for providing the light passing through the pinhole to the beam splitter.
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