SUBSTRATE SUPPORTING APPARATUS OF NONCONTACT TYPE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT AND METHOD OF THE SAME,申请号KR20070076738-传众专利搜索

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发明名称	SUBSTRATE SUPPORTING APPARATUS OF NONCONTACT TYPE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT AND METHOD OF THE SAME
摘要
申请公布号	KR100900750(B1)	申请公布日期	2009.06.05
申请号	KR20070076738	申请日期	2007.07.31
申请人		发明人
分类号	H01L21/683	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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