| 摘要 |
A probe substrate assembly is provided to arrange an upper pad of a plurality of probes and a spatial transformer accurately by reinforcing the strength of the probe board. A probe substrate(40) has a plurality of a first contact hole corresponding to a pad, and a connection pin(14) passes through a first contact hole. A probe arrangement substrate(60) has a plurality of second contact holes corresponding to the first contact hole and the pad. The connection pin passes through the second contact hole, and a reinforcing substrate(50) is positioned between the probe substrate and the probe arrangement substrate. The reinforcing substrate has an open area corresponding to the first contact hole, and the second contact hole fixes the connection pin passing through the second contact hole.
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