MULTI-LAYER WITH SUPERIOR ANTIWEAR AND TOUGHNESS TO CUTTING TOOL

摘要

A complex multilayer hard thin film having superior abrasion resistance and toughness is provided to improve abrasion resistance and toughness by consecutively depositing a first film, a second film, a third film, and a fourth film having different composition ratio and different thin film structure. A complex multilayer hard thin film having superior abrasion resistance and toughness comprises a step for depositing a first film on a cermet tool or a cemented carbide tool through physical vapor deposition to improve adhesion force; a step for depositing a second film(Ti,Al) to improve shock resistance and chipping resistance; a step for depositing a third film having high bias voltage compared to the second film to improve abrasion resistance and oxidation resistance; and a step for consecutively depositing a fourth film having low frictional coefficient.