| 摘要 |
PROBLEM TO BE SOLVED: To adjust the detection sensitivity of defect detection, performed by using image signals, respectively acquired from each imaging pixel, corresponding to each S/N ratio of the imaging pixel, in defect detection wherein a gray level difference is detected, between a pixel inside one unit pattern and a pixel inside the other unit pattern, corresponding to the pixel between two unit patterns, appearing repeatedly to correspond to a repeating pattern on a photographed image acquired by imaging a sample surface, where the repeating pattern is formed by an imaging element formed by arraying a plurality of imaging pixels, and to a case when the gray level difference exceeds a detection threshold, where the pixels from which the gray level difference is detected represent a defect. SOLUTION: The gray level difference is corrected, corresponding to the S/N ratio of an output signal of the imaging pixels generating respectively each gray level value from which the gray level difference is detected. Alternatively, the detection threshold to be compared with the gray level difference is corrected corresponding to the S/N ratio of the output signal of the imaging pixels generating respectively each gray level value, from which the gray level difference is detected. COPYRIGHT: (C)2009,JPO&INPIT
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