发明名称
摘要 <p>The present invention is directed towards a method and a system of patterning first and second opposed sides of a substrate. The method and system may employ a mold assembly and obtaining a desired spatial relationship between the first and second opposed sides of the substrate and the mold assembly. In a further embodiment, the method and system may employ a first and a second mold assembly.</p>
申请公布号 JP2009518863(A) 申请公布日期 2009.05.07
申请号 JP20080544418 申请日期 2006.11.30
申请人 发明人
分类号 H01L21/027;B29C39/02 主分类号 H01L21/027
代理机构 代理人
主权项
地址