发明名称 |
Vibration type MEMS switch and fabricating method thereof |
摘要 |
A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.
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申请公布号 |
US7528689(B2) |
申请公布日期 |
2009.05.05 |
申请号 |
US20050182775 |
申请日期 |
2005.07.18 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE MOON-CHUL;PARK TAE-SIK;JEONG HEE-MOON |
分类号 |
H01P1/10;H01H57/00 |
主分类号 |
H01P1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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