| 摘要 |
A scanning electron microscopy having a real time measuring function and a real time measuring method is provided to allow a user to observe easily by measuring the size of the sample in real time from an image. An image of sample is outputted to an output device(S10), and an object to be measured is inputted(S20). The measurement target is one of a straight distance, a rectangular area, an oval area, a non-linear distance, and the circumstance of the closed trace. A measured value of the inputted measurement target is counted(S30), and the measured value of the calculated measurement target is outputted on the outputted image(S40), and the image of result is stored.
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