| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a microfluid device constituted of a substrate having a recessed part formed thereto and a cover material with the geometrical irregularity between individuals and the producing possibility of an unjoined region reduced in the joined part of the substrate and the cover material. SOLUTION: In the manufacturing method of the microfluid device, a recessed part serving as a flow channel, a chamber or a reservoir is preliminarily formed to the substrate and a liquid energy beam curable resin is adhered to the surface on the recessed part formed side of the substrate. Then, the energy beam curable resin is cured by an energy beam irradiation means to form the cover on the recessed part of the substrate and the flow channel, the chamber or the reservoir can be formed. COPYRIGHT: (C)2009,JPO&INPIT
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