| 摘要 |
Contact-less three-dimensional profile measuring device has source of white light, light separator intended for formation of support and measuring beams of radiation, standard mirror installed in pass of support beam of radiation, DCC (device with charge coupling) matrix with system of information processing installed in pass of brought to coincidence radiation beams. Means for change of optical pass difference between support and measuring beams of radiation are arranged as flat springs with fixed standard mirror with possibility of displacement by means of electromagnetic mover, and three-dimensional profile is built by sequence of video-frames with following attribution to elevation of each point of number of step at which maximal intensity if obtained, at that from result obtained one subtracts profile of sample surface that is preliminarily registered and stored in memory. |
