METHOD OF PROVIDING PATTERNED EMBEDDED CONDUCIVE LAYER USING LASER AIDED ETCHING OF DIELECTRIC BUILD-UP LAYER

摘要

A method of providing a patterned conductive layer. The method includes: providing a build-up layer comprising an insulating material; laser irradiating selected portions of the build-up layer according to a predetermined pattern of the patterned conductive layer to be provided, laser irradiating comprising using a laser beam having a photon energy higher than a bonding energy of at least some of the chemical bonds of the insulating material to yield predetermined laser-weakened portions of the build-up layer according to the predetermined pattern; removing the laser-weakened portions of the build-up layer to yield recesses according to the predetermined pattern; and filling the recesses with a conductive material to yield the patterned conductive layer.