Six axes positioning system with a space free from magnetic field,申请号EP20010120844-传众专利搜索

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发明名称	Six axes positioning system with a space free from magnetic field
摘要
申请公布号	EP1189018(B1)	申请公布日期	2009.02.25
申请号	EP20010120844	申请日期	2001.08.30
申请人	VISTEC ELECTRON BEAM GMBH	发明人	KIRSCHSTEIN, ULF-CARSTEN;BECKERT, ERIK;HOFFMANN, ANDREW;SCHAEFFEL, CHRISTOPH, DR. ING.;SAFFERT, EUGEN;ZENTNER, JOHANNES;GRAMSCH, TORSTEN
分类号	G01B11/27;G01B11/00;G03F7/20;H01L21/00;H01L21/027;H01L21/68	主分类号	G01B11/27
代理机构		代理人
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