发明名称 Reduced crosstalk sensor and method of formation
摘要 Isolation methods and devices for isolating regions of a semiconductor device are disclosed. The isolation methods and structures include forming an isolating trench among pixels or other active areas of a semiconductor device. The trench extends through the substrate to the base layer, wherein a liner may be deposited on the side walls of the trench. A conductive material is deposited into the trench to block electrons from passing through.
申请公布号 US7492027(B2) 申请公布日期 2009.02.17
申请号 US20040781706 申请日期 2004.02.20
申请人 MICRON TECHNOLOGY, INC. 发明人 MOULI CHANDRA
分类号 H01L31/00;H01L27/146;H01L27/148 主分类号 H01L31/00
代理机构 代理人
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