发明名称 |
ALIGNMENT METH0D, IMPRINT METH0D, ALINGNMENT APPARATUS, AND P0SITI0N MEASUREMENT METH0D |
摘要 |
<p>In an alignment method for effecting alignment between two plate-like objects, a first plate-like object provided with a first alignment mark and a second plate-like object provide with a second alignment mark are disposed opposite to each other. A first area and a second area are provided at mutually nonoverlapping positions in an image pickup area for being observed through an image pickup > device. Images of the first and second alignment marks are picked up by the image pickup device from a direction substantially perpendicular to an in-plane direction of the first and second plate-like objects. Alignment control is effected by using first information about a deviation of the first alignment mark from a predetermined position in the first area and second information about a deviation of the second alignment mark from a predetermined position in the second area.</p> |
申请公布号 |
KR20090009874(A) |
申请公布日期 |
2009.01.23 |
申请号 |
KR20087028097 |
申请日期 |
2007.04.18 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SUEHIRA NOBUHITO;SEKI JUNICHI;INA HIDEKI;SENTOKU KOICHI |
分类号 |
H01L21/027;B81C99/00;G03F9/00;H01L21/66 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|