发明名称 Method of growing nitrogenous semiconductor crystal materials
摘要 What is described here is a process for the initial growth of nitrogenous semiconductor crystal materials in the form AXBYCZNVMW wherein A, B, C is an element of group II or III, N is nitrogen, M represents an element of group V or VI, and X, Y, Z, W denote the molar fraction of each element of this compound, using a, which are deposited on sapphire, SiC or Si, using various ramp functions permitting a continuous variation of the growth parameters during the initial growth.
申请公布号 US7473316(B1) 申请公布日期 2009.01.06
申请号 US20000624252 申请日期 2000.07.24
申请人 AIXTRON AG 发明人 SCHOTTKER BERND;HEUKEN MICHAEL;JUERGENSEN HOLGER;STRAUCH GERD;WACHTENDORF BERND
分类号 C30B25/16;C30B29/38;C23C16/34;C30B25/02;H01L21/205 主分类号 C30B25/16
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