| 摘要 |
A method for manufacturing a probe card is provided to form a probe tip to correspond to a minute pitch by using a part of a trench region as a mold for the probe tip. A trench is formed by etching and removing a predetermined region of a sacrificial substrate. Photoresist layers(140,160) are formed by coating the photosensitive material on the sacrificial substrate(100) to fill the trench. The mold for a body part(150) of the probe is formed by etching and removing a bar region which is extended from the trench as long as the regular length while including a part of the region corresponding to the trench in the photoresist layer. The body part of the probe is formed by using the conductive material in the mold.
|
