发明名称 Semiconductor wafer treatment method
摘要 A semiconductor wafer treatment method for dividing an adhesive tape, which has been stuck to the entire back of a semiconductor wafer, along divided streets of the semiconductor wafer. Before division of the adhesive tape by application of laser beams, the state of the divided streets is detected, and laser beams are applied to the adhesive tape based on such detection.
申请公布号 US7468309(B2) 申请公布日期 2008.12.23
申请号 US20060390339 申请日期 2006.03.28
申请人 DISCO CORPORATION 发明人 SHIGEMATSU KOICHI;YOSHIKAWA TOSHIYUKI
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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