Specimen-handling arm for vacuum chamber - has pneumatic ram using metal membrane bellows to effect seal

摘要

The compressed air ram effects the precise linear displacement of a study specimen in the vacuum chamber of a heavy ion-accelerator, using tubular metallic membrane bellows to seal the ram relative to the chamber. A rod slides axially into the chamber to locate a specimen on a terminal mounting, coupled to the ram by a slide. A fixed cylindrical casing guides the slide, mounted on a height-adjustable plate which is stooled above the chamber . flange. The bellows has flanges on each end, extending between the slide and a flange mounted transition tube. Two rams may be mounted side by side, with the plate in individually adjustable halves separated by a seal.