| 摘要 |
PURPOSE:To obtain a uniform and flat A-Ba-Cu oxide superconductive thin film (A is group IIIa element) by heat-treating a thin film with a specific composition in the oxidizing atmosphere. CONSTITUTION:A porcelain formed with the composition of (A1-xBax)CuOy (A is a group IIIa element) is used as a target, a thin film of (A1-xBax)CuOy is formed (Y<=3) by the spattering in the mixed atmosphere of argon and oxygen, and the (A1-xBax)CuOy thin film thus obtained is heat-treated at 400 deg.C-700 deg.C in the oxidizing atmosphere. Thereby, a (A1-xBax)CuOy superconductive thin film with the good quality near the unit crystal can be formed, and its adhesion is good, thus a thin film stable for the heat cycle can be obtained.
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