| 摘要 |
PROBLEM TO BE SOLVED: To perform proper observation by efficiently washing the tip end face of an optical system such as an objective lens, and also efficiently recovering water or the like after washing. SOLUTION: This observing device includes: the optical system 2 having an observation window 7 at the tip end face 2a opposite to a specimen; a liquid delivery port 11 for supplying washing liquid A to the observation window 7 of the optical system 2; and a suction port disposed on the opposite side to the liquid delivery port 11 with the observation window 7 interposed between them to suck the washing liquid A supplied to the observation window 7, wherein hydrophobic treatment is performed for an area 19 of the tip end face 2a of the optical system 2 interposed between the liquid delivery port 11 and the suction port 12. COPYRIGHT: (C)2009,JPO&INPIT
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