| 摘要 |
PROBLEM TO BE SOLVED: To provide a resistance measuring method capable of using a thick probe. SOLUTION: This resistance measuring method for calculating resistance values of a plurality of sets of elements 3 to be measured, using a measuring instrument 10 having a four-terminal resistance measuring function, in the elements 3 to be measured having the element 3 to be measured and a pair of pads 4 connected electrically to the element 3 to be measured, in each thereof, forms a testing electric connection pattern 5 for connecting in series the plurality of sets of elements 3 to be measured, brings a pair of voltage measuring probes 15 into contact with the pair of pads 4, and brings the pair of voltage impressing probes 15 into contact with the pair of pads 4 electrically connected respectively to the pair of pads 4 by the electric connection pattern. COPYRIGHT: (C)2008,JPO&INPIT
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