| 摘要 |
PROBLEM TO BE SOLVED: To reduce an increase of a wiring resistance even when an electro-migration durability of a metal wiring layer is improved by applying a liquid discharging head, a liquid discharging apparatus and a manufacturing method for a liquid discharging head, for example, to an inkjet printer by a thermal system which has both a heating element and a transistor for driving the heating element formed integrally on a substrate. SOLUTION: The metal wiring layer 56 is connected to the heating element 27 via a contact part 47 set at an insulating protecting layer 46. The metal wiring layer 56 is formed by a layered structure of both an aluminum film 52 and a titan nitride film 50 set at the heating element 27 side of the aluminum film 52. COPYRIGHT: (C)2006,JPO&NCIPI
|
