<p>A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.</p>
申请公布号
WO2008061097(A3)
申请公布日期
2008.07.10
申请号
WO2007US84568
申请日期
2007.11.13
申请人
GLIMMERGLASS NETWORKS, INC.;STAKER, BRYAN, P.;FERNANDEZ, ANDRES;KINDWALL, ALEXANDER, P.;OWENS, WINDSOR, E.
发明人
STAKER, BRYAN, P.;FERNANDEZ, ANDRES;KINDWALL, ALEXANDER, P.;OWENS, WINDSOR, E.