| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas integration unit whose foot space is reduced. SOLUTION: A gas integration unit 1 is provided with: first gas units 72A, 72B and 72C for controlling the supply of the first gas; a second gas unit 73 connected to the first gas units 72A, 72B and 72C for controlling purge gas to join the first gas units 72A, 72B and 72C by a plurality of fluid control equipment 31 to 34, 38A to 43A, 38B to 43B and 38C to 43C; and layered blocks 61A, 61B and 61C laminated on the first gas units 72A, 72B and 72C, wherein a part of the fluid control equipment 38A, 38B and 38C is laminated on the layered blocks 61A, 61B and 61C. COPYRIGHT: (C)2008,JPO&INPIT
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