METHOD OF ADJUSTING LASER BEAM OUTPUT, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING DISPLAY DEVICE, AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce intensity deviation in each laser output without being affected by a difference, such as a difference in the depth of focus in each laser beam irradiation optical system, in parallel irradiation of a plurality of laser beams. SOLUTION: Prior to parallel irradiation of laser beams to a body to be irradiated with laser beams by a plurality of laser irradiation optical units, optical characteristics are measured in the body to be irradiated with laser beams after irradiation with laser beams by respective laser irradiation optical units. Based on the measured results, laser beam output from each laser irradiation optical unit is adjusted so that the difference in the optical characteristics for each laser irradiation optical unit is within a prescribed range. COPYRIGHT: (C)2009,JPO&INPIT