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发明名称
摘要
申请公布号
JP4187793(B2)
申请公布日期
2008.11.26
申请号
JP19980502910
申请日期
1997.02.18
申请人
发明人
分类号
H01L21/027;H01L29/78;G03F7/20;H01L21/02;H01L21/033
主分类号
H01L21/027
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代理人
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