| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of improving connection reliability. SOLUTION: The inspection device 100 includes: a table 2 as a body under test holding means for holding a body under test 1; a nest box 4 accommodating contact pin blocks 3, 3, accommodating a contact pin 31 group, measurement circuit boards 41, 41, and a back panel board 42; and an actuator 5 simultaneously driving the contact pin blocks 3, 3, and the nest box 4 in vertical directions. A cable group 7 connecting the contact pins 31, 31, with the back panel board 42 is provided between the contact pin blocks 3, 3, and the nest box 4. COPYRIGHT: (C)2009,JPO&INPIT
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