| 发明名称 |
METHOD AND STRUCTURE TO REDUCE CONTACT RESISTANCE ON THIN SILICON-ON-INSULATOR DEVICE |
| 摘要 |
A method (and system) of reducing contact resistance on a silicon-on-insulator device, including controlling a silicide depth in a source-drain region of the device.
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| 申请公布号 |
US2008274597(A1) |
申请公布日期 |
2008.11.06 |
| 申请号 |
US20080174683 |
申请日期 |
2008.07.17 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GREENE BRIAN J.;HSU LOUIS LU-CHEN;MANDELMAN JACK ALLAN;SUNG CHUN-YUNG |
| 分类号 |
H01L21/336 |
主分类号 |
H01L21/336 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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