| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck hard to suffer a dielectric breakdown, shallow and excellent in cladding. SOLUTION: The electrostatic chuck 500 is mounted on a substrate 1 bearing surface of an electrode 12 having a gas supplying hole 43 for thermal conduction, and includes an electrically conductive layer 55 and insulating layers sandwiching the electrically conductive layer 55. In insulating layers, not the one 53 on the electrode 12 side, but the ones on the substrate 1 side include a plurality of thin membrane layers 571, 573. Even when one of the thin membrane layers 571, 573 is chipped, a dielectric breakdown does not occur. The electrode 12 has a net shape furrow to communicate to the gas supplying hole 43 for thermal conduction, on the substrate 1 bearing surface. The electrically conductive layer 55 and the insulating layers 53, 571-573 including a bottom of the furrow closely contact the substrate 1 bearing surface, and is penetrated with the gas supplying hole 43 for thermal conduction. Also on the bottom of the furrow 510, the insulating layers 53, 571-573 exist. COPYRIGHT: (C)2009,JPO&INPIT |
