| 摘要 |
PROBLEM TO BE SOLVED: To provide a reversing mechanism of a plate-like body capable of shortening the time required for reversing one plate-like body. SOLUTION: The reversing mechanism of the plate-like body comprises a chuck part 2 in which a pair of chucks 4, 5 capable of attracting/detracting the plate-like body by remotely applying the attraction force are arranged separately from each other with attraction faces 8, 9 opposing each other, a rotating part 3 for rotating the chuck parts 2 around the axis S of rotation parallel to the attraction faces 8, 9, and a plate-like conveying unit 6 having a plate-like body holding part 16 holding the plate-like body in a horizontal posture and capable of relatively moving the plate-like body holding part with respect to the chuck part 2 between the position between the attraction faces 8, 9 of the chuck part 2 and the position free from any trouble in the rotation of the chuck part 2 by the rotating part 3. COPYRIGHT: (C)2009,JPO&INPIT |
