An apparatus and method for initiating a process gas plasma. A conductive plate having a plurality of conductive fingers is positioned in a microwave applicator. An arc forms between the conductive fingers to initiate the formation of a plasma. A transport mechanism may convey process materials through the plasma. A spray port may be provided to expel processed materials.
申请公布号
WO2007143301(A3)
申请公布日期
2008.10.02
申请号
WO2007US67860
申请日期
2007.05.01
申请人
BWXT Y-12, LLC;RIPLEY, EDWARD, B.;SEALS, ROLAND, D.;MORRELL, JONATHAN, S.
发明人
RIPLEY, EDWARD, B.;SEALS, ROLAND, D.;MORRELL, JONATHAN, S.