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发明名称
VACUUM CHEMICAL REACTION DEVICE
摘要
申请公布号
JPH0349221(A)
申请公布日期
1991.03.04
申请号
JP19890184358
申请日期
1989.07.17
申请人
ANELVA CORP
发明人
ASAMAKI TATSUO
分类号
C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/31
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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