A phase-change type micro actuator and temperature control method of actuating chamber in micro actuator and micro pump using this micro actuator,申请号KR20070007106-传众专利搜索

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发明名称	A phase-change type micro actuator and temperature control method of actuating chamber in micro actuator and micro pump using this micro actuator
摘要
申请公布号	KR100860801(B1)	申请公布日期	2008.09.30
申请号	KR20070007106	申请日期	2007.01.23
申请人		发明人
分类号	B81B7/00	主分类号	B81B7/00
代理机构		代理人
主权项
地址

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