发明名称 |
SUSPENDED NANOWIRE SENSOR AND METHOD FOR FABRICATING THE SAME |
摘要 |
Provided is a suspended nanowire sensor having good sensing characteristics and suitable for mass production, a method for fabricating the suspended nanowire sensor. The suspended nanowire sensor includes: first and second sensor electrodes formed on upper portions of a substrate and physically separated from each other; and a nanowire sensor material piece extending from the first sensor electrode to the second sensor electrode and physically suspended between the first and second sensor electrodes.
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申请公布号 |
US2008224717(A1) |
申请公布日期 |
2008.09.18 |
申请号 |
US20070931064 |
申请日期 |
2007.10.31 |
申请人 |
ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KIM YONG-SHIN;KIM YOUN-TAE;PARK DUCK-GUN |
分类号 |
G01R27/08;H01S4/00 |
主分类号 |
G01R27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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