| 摘要 |
PROBLEM TO BE SOLVED: To enable inspection with reduced influence of vibration that supports size increase of an object, in an image capturing device in which a deflection part for deflecting the light from an object, in a substantially horizontal direction and an imaging part for receiving the deflected light are supported horizontally. SOLUTION: An image capturing device 100 that captures an image by imaging an imaging region, while carrying a substrate 50 in the horizontal direction comprises an imaging part 4; a deflection part 5 for transmitting the light coming from the substrate 50 of the imaging region to the imaging part 4; a horizontal support body 3 for supporting the imaging part 4 and the deflection part 5; and gate columns 2 supporting a beam installed so as to straddle a carrying passage of the substrate 50 by the columns, on the both sides facing perpendicular to the carrying direction, wherein the horizontal support body 3 is fixed on the beam so as to overhang toward both on the upstream and the downstream sides of the carrying direction, and the imaging part 4 and the deflection part 5 are disposed, respectively in one and the other of the overhang portions. COPYRIGHT: (C)2008,JPO&INPIT
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