发明名称 Method for making a stacked structure comprising a thin film adhering to a target substrate
摘要 A process for manufacturing a stacked structure comprising at least one thin layer bonded to a target substrate, in which a thin layer is formed by introduction gaseous species into an initial substrate, to form a weakened layer separating a film from the rest of the initial substrate, a first contact face of the thin layer is bonded to a face of an intermediate substrate by molecular adhesion, and the initial substrate is fractured at the weakened layer so as to expose a free face of the thin layer. The intermediate substrate is then removed in order to obtain the stacked structure.
申请公布号 KR100855083(B1) 申请公布日期 2008.08.29
申请号 KR20037006179 申请日期 2003.05.03
申请人 发明人
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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