| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean carrying device, in which dust, if any, generated from travel rails and wheel contact parts as main dust generating sources is not diffused, but discharged under the floor, and the number of the fan filter units in the clean carrying device is reduced to lower the cost, and save energy. SOLUTION: In the clean carrying device, a stacker crane 3 travels on wheels on the travel rails 2, while air in the clean room 1 is discharged from an installation floor surface for the travel rails 2. A ventilation floor 4 disposed as the installation floor surface is set in such a way that the opening ratio is larger around the travel rails 4a than in other parts 4b. COPYRIGHT: (C)2008,JPO&INPIT
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