| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquid droplet jetting apparatus with a small consumption of electric power and a method for manufacturing the liquid droplet jetting apparatus. <P>SOLUTION: The method for manufacturing the liquid droplet jetting apparatus is equipped with a recess forming process of forming a recess 36 on the face of the opposite side to a flow path unit 2 of an oscillating plate 30, as viewed from the direction intersecting at right angles to the oscillating plate 30, in one region between two regions divided by a dividing line passing through the center of a pressure room 14, a piezoelectric layer forming process of forming thereafter, a piezoelectric layer 31 by depositing particles of a piezoelectric material, and a first electrode forming process of forming furthermore thereafter, a first electrode at a position corresponding to a region where the recess of the piezoelectric layer 31 is not formed. It is possible thereby to decrease rigidity of the oscillating plate 30 and to suppress the consumption of electric power. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
