发明名称 Dual flow circulation system for a mover
摘要 A circulation system ( 330 ) for a mover ( 328 ) includes a fluid source ( 360 ) that directs a first fluid ( 356 ) into a first inlet ( 364 A) of the mover ( 328 ) and a second fluid ( 358 ) into a second inlet ( 366 A) of the mover ( 328 ). In one embodiment, a temperature of the second fluid ( 358 ) at the second inlet ( 366 A) is different than a temperature of the first fluid ( 356 ) at the first inlet ( 364 A). For example, in one embodiment, the temperature of the first fluid ( 356 ) at the first inlet ( 364 A) is at least approximately 10 degrees greater than the temperature of the second fluid ( 358 ) at the second inlet ( 366 A). In alternative embodiments, the temperature of the first fluid ( 356 ) is at least approximately 2, 5, or 15 degrees greater than the temperature of the second fluid ( 358 ).
申请公布号 US7414336(B2) 申请公布日期 2008.08.19
申请号 US20050214674 申请日期 2005.08.30
申请人 NIKON CORPORATION 发明人 BINNARD MICHAEL
分类号 H02K9/00;H02K1/32;H02K9/19;H02K41/03 主分类号 H02K9/00
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