| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying robot capable of carrying in/out a processing target article at high-speed, and a vacuum device. SOLUTION: In a carrying chamber 21, a carrying robot 23 wherein first and second arms 30, 40 are attached to first and second driving shafts 35, 45 is disposed. The first and second driving shafts 35, 45 separates first and second arms 30, 40 to an extent not to collide with the first and second driving shafts 35, 45 when the first and second arms 30, 40 are contracted and rotated at the minimum radius. The height of the first and second arms 30, 40 is made to be different so as not to collide with each other if coming close to each other to an extent superimposing the minimum radius of rotations. Therefore, the carrying robot 23 requiring a small installation area and enabling high-speed carrying can be obtained. COPYRIGHT: (C)2008,JPO&INPIT
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