| 摘要 |
A substrate transferring apparatus and a substrate transferring method using the same are provided to prevent deformation of a plate or a FOUP(Front Opening Unified Pod) by forming an air curtain at an upper part of a substrate. A substrate transferring apparatus includes an arm unit, a plate(33), and a nozzle unit(32). The plate is coupled with the arm unit through a connective unit(31). A substrate is loaded on the plate. The nozzle unit discharges a gas(50) onto the substrate. The nozzle unit is arranged on the connective unit. A gas supply unit provides the gas. The gas supply unit is formed in the inside of the connective unit in order to supply the gas to a tube(20) connected to the nozzle unit.
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