发明名称 |
Surface contamination detection |
摘要 |
A contamination detector in accordance with one embodiment of the invention includes a plasma generation system operable to direct an atmospheric plasma discharge towards a surface. The contamination detector further includes a light capture system to capture light generated by interaction of the atmospheric plasma discharge with the surface. The light capture system guides the captured light to an optical detection system configured to detect a contaminant.
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申请公布号 |
US7397560(B2) |
申请公布日期 |
2008.07.08 |
申请号 |
US20060397064 |
申请日期 |
2006.04.04 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
SEAWARD KAREN L.;DUTTON DAVID T. |
分类号 |
G01J3/443;G01N21/73;G01N21/94 |
主分类号 |
G01J3/443 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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