发明名称 Surface contamination detection
摘要 A contamination detector in accordance with one embodiment of the invention includes a plasma generation system operable to direct an atmospheric plasma discharge towards a surface. The contamination detector further includes a light capture system to capture light generated by interaction of the atmospheric plasma discharge with the surface. The light capture system guides the captured light to an optical detection system configured to detect a contaminant.
申请公布号 US7397560(B2) 申请公布日期 2008.07.08
申请号 US20060397064 申请日期 2006.04.04
申请人 AGILENT TECHNOLOGIES, INC. 发明人 SEAWARD KAREN L.;DUTTON DAVID T.
分类号 G01J3/443;G01N21/73;G01N21/94 主分类号 G01J3/443
代理机构 代理人
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