| 摘要 |
A fluid supply member is provided to maintain a fluid supply pipe at a predetermined temperature by enabling a control of a heating temperature of a tape heater. Fluid is supplied by a fluid supply pipe. A tape heater(100) is included in the fluid supply pipe to heat the fluid supply pipe, including a heating part(110) and a power apply part(120). The heating part includes a tape body wound around as a coil shape along the outer circumferential surface of the fluid supply pipe and a heating coil installed in the tape body. The power apply part applies power to the heating coil. A temperature adjust member measures the temperature of the heating coil and adjust the quantity of power applied by the power apply part to adjust the heating temperature of the heating coil.
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