WAFER CARRYING APPARATUS HAVING A STATIC ELECTRICITY GENERATION PROTECTION

摘要

A wafer carrying apparatus having a static electricity generation protection unit is provided to eliminate the static electricity generated between a wafer protection tape and a grip of a wafer transfer unit by supplying ions into the wafer carrier through holes of a tower. A wafer carrying apparatus comprises a plurality of wafer carriers(100), a wafer transfer unit and a static electricity generator(300). The wafer carriers comprise entrance and exit paths for wafers. The wafer transfer unit stores the wafers in each wafer carrier along the entrance and exit paths. The static electricity generator supplies ions into each wafer carrier.