| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone generating apparatus with which the decomposition of formed ozone caused by contact of the ozone with a high temperature electrode can be prevented and a gas containing ozone in a higher concentration can be obtained by increasing the cooling degree of the formed ozone gas. SOLUTION: In the ozone generating apparatus, which has such a constitution that a gas containing oxygen is supplied into a space 4 formed between a ground electrode 2 and a high voltage electrode 1, wherein a dielectric layer 3 is interposed between the space 4 and at least one of the ground electrode 2 and a high voltage electrode 1, ozone is generated by performing discharge in the space 4, and the gas containing formed ozone is exhausted from the other end side and which is equipped with a cooling medium passage 7 provided at the outer side of the ground electrode 2, a shielding body 11 for separating the gas containing formed ozone from the high voltage electrode 1 is provided on the more downstream side than the end part in the flow direction of the gas of the high voltage electrode 1. COPYRIGHT: (C)2008,JPO&INPIT
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