| 摘要 |
A magnetic multi-element alloy film adapted to be used in a high-frequency operation is provided. The magnetic multi-element alloy film is employed to improve a Q factor and an inductance value of a thin film inductor operated in high frequency. The design concept of a multi-element high-entropy alloy is introduced into the magnetic multi-element alloy film. With material characteristics including high randomness, nanometer microcrystalline structure, low coercive magnetic field and high resistivity, the magnetic multi-element alloy film can still have favorable soft magnetism when operated in high frequency.
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